How Clean Is Clean?Defining Acceptable Cleanliness Levels.
如何清洗才能洁净？定义可接受的清洁度水平

Overview 概述

•         Why monitor cleanliness 为什么要检测洁净度？

•         Types of contamination 污染类型

•         Types of cleanliness measurement methods洁净度检测方法类型

•         Most common verification/measurement methods最常用的确认/测量方法

•         Criteria for selecting a cleanliness monitoring method选择清洗监测方法标准

•         Cost impact of cleanliness level清洁度水平的成本影响

•         Suggested approaches to defining acceptable limits 推荐的定义合适限值的方法

•         Example of defining acceptable limits定义标准限值示例

•         Summary 总结

Why Monitor Cleanliness
为什么监测清洁度

•         Establish benchmark 建立基准点

•         Optimize cleaning process优化清洗流程

•         Maintain process control 维护工艺控制

•         Know if cleanliness is a problem 知道清洁度是否是一个问题

•         Ensure product quality 保证产品质量

•         Contamination degrades performance污染降低性能

•         Varying number of parts cleaned部件清洗数量不同

•         Varying degree of contamination污染程度不同

•         Detect problems sooner检测问题较快

•         Prevent downstream problems 预防下游问题     

Types Of Contamination
污染类型

•         Particulate微粒

•          Thin film or molecular薄膜或者分子

•          Microbial 微生物

Types Of Cleanliness Measurement Methods
洁净度测量方法类型

Indirect间接方式

       Any technique that does not take a measurement from the actual surface or area of interest & does not identify Species

任何非实物表面或者需检测区域的测量及不辨识种类的技术

Direct直接方法

       Any technique that takes a measurement from the actual surface or area of interest & does not identify species

任何从实物表面或者需检测区域的测量及不辨识种类的技术

Analytical 分析

       Any technique that identifies the species and measures the amount of contamination. Analytical method may be direct or indirect

任何辨别种类和测量污染数量的技术；分析方法可以是直接或者间接的；

“Ideal” Cleanliness Measurement Method
理想的清洁度测量方法

•         Quantitative 定量

•         Non-contact  非接触式

•         Non-destructive 无损害

•         Direct 直接

•         Fast measurement 快速检测

•         Large area as well small area 大、小区域均可

•         Easy to operate 易操作

•         Low skill level for operation 操作技术容易

•         Low acquisition and operating cost 购买和运行成本低

Indirect And Direct Methods
间接和直接方法

•         Non volatile residue (NVR)无挥发性残余

•         Ultraviolet (UV) spectroscopy紫外线光谱

•         Optical particle counter (OPC)光学粒子计数器

•         Magnified visual inspection 放大外观检测

•         Black light 不可见光

•         Water break test 水膜破散测试

•         Contact angle 接触角度

•         Optically stimulated electron emission (OSEE)光学受激电子发射

•         Measurement of evaporative rate analysis (MESERAN)蒸发率分析测量

•         Total organic carbon (TOC)总有机碳

Analytical Methods
分析方法

•         Auger electron spectroscopy (AES)/scanning auger microscopy (SAM)奥格电子光谱学/扫描奥格电子显微镜

•         Energy Dispersive x-ray (EDX)/wavelength Dispersive x-ray (WDX)能量色散X-射线分析/波长色散X-射线分析 

•         Electron spectroscopy for chemical analysis (ESCA/XPS)电子频谱化学分析

•         Dynamic secondary ion mass spectroscopy (dynamic SIMS)动态二级粒子质谱分析

•         Static secondary ion mass spectroscopy (static SIMS) or TOF-SIMS静态二级粒子质谱分析

•         Scanning electron microscopy (SEM)

•         扫描电子显微镜检查法

•         Fourier transform infrared spectroscopy (FTIR)

•         傅里叶变换红外光谱学

•         Attenuated total reflectance Fourier transform infrared spectroscopy (ATR FTIR)衰减全反射比傅立叶变换红外光谱分析

•         Raman spectroscopy (RS)拉曼光谱分析

•         X-ray fluorescence (XRF)X射线荧光分析