Table 1. Most Common Indirect And Direct Methods
表1.最常用间接和直接方法
 
Table 2. Most Common Analytical Methods
表2.常用分析方法
|
Feature特性 |
AES/SAM
奥格电子光谱学/扫描奥格电子显微镜 |
EDX/WDX能量色散X-射线分析/波长色散X-射线分析 |
ESCA (XPS)电子频谱化学分析 |
DYNAMIC SIMS动态二级粒子质谱分析 |
STATIC SIMS静态二级粒子质谱分析 |
|
Depth Profiling深度轮廓 |
䦋㌌㏒㧀좈琰茞ᓀ㵂Ü |
䦋㌌㏒㧀좈琰茞ᓀ㵂Ü |
䦋㌌㏒㧀좈琰茞ᓀ㵂Ü |
䦋㌌㏒㧀좈琰茞ᓀ㵂Ü |
䦋㌌㏒㧀좈琰茞ᓀ㵂Ü |
|
• Bulk主体 (>10 Microns微米) |
Yes是 |
No否 |
Yes是 |
Yes是 |
Yes是 |
|
• Near Surface近表面 (<2 Microns微米) |
No否 |
Yes是 |
No否 |
No否 |
No否 |
|
Depth Profiling深度轮廓 |
Yes是 |
No否 |
Yes是 |
Yes是 |
No否 |
|
Identify Interfaces表面鉴别 |
Yes是 |
Some部分 |
Yes是 |
Yes是 |
No否 |
|
Quantitative Measurement定量检测 |
Yes是 |
Yes是 |
Yes是 |
Yes是 |
No否 |
|
Elemental元素 |
Yes是 |
Yes是 |
Yes是 |
Yes是 |
Some部分 |
|
Chemical化学药剂 |
Some部分 |
No否 |
Yes是 |
Some部分 |
Yes是 |
|
Identifies Organic Species有机种类辨别 |
No否 |
No否 |
Yes是 |
No否 |
Some部分 |
|
Identifies Inorganic Species无机种类辨别 |
Yes是 |
Yes是 |
Yes是 |
Yes是 |
Some部分 |
|
Area Inspected检测区域 |
Small小 |
Small小 |
Small小 |
Small小 |
Small小 |
|
Limitations局限 |
Slow慢 |
Slow慢 |
Slow慢 |
Slow慢 |
Slow慢 |
|
䦋㌌㏒㧀좈琰茞ᓀ㵂Ü |
Expensive昂贵 |
Expensive昂贵 |
Expensive昂贵 |
Expensive昂贵 |
Expensive昂贵 |
|
䦋㌌㏒㧀좈琰茞ᓀ㵂Ü |
High Skill Level高技术水平 |
High Skill Level高技术水平 |
High Skill Level高技术水平 |
High Skill Level高技术水平 |
High Skill Level高技术水平 |
|
Source: Problem Solving SURFACE ANALYSIS Techniques, Robert D. Cormia; Advanced Materials & Processes 12/92
来源：表面分析技术问题解决， Robert D. Cormia; 高级材质和工艺12/92 |
|
Feature特性 |
TOF SIMS TOF静态二级粒子质谱分析 |
FTIR傅里叶变换红外光谱学 |
ATR -FTIR衰减全反射比傅立叶变换红外光谱分析 |
RS拉曼光谱分析 |
XRF 射线荧光分析 |
|
Depth Profiling深度轮廓 |
䦋㌌㏒㧀좈琰茞ᓀ㵂Ü |
䦋㌌㏒㧀좈琰茞ᓀ㵂Ü |
䦋㌌㏒㧀좈琰茞ᓀ㵂Ü |
䦋㌌㏒㧀좈琰茞ᓀ㵂Ü |
䦋㌌㏒㧀좈琰茞ᓀ㵂Ü |
|
• Bulk主体 (>10 Microns微米) |
Yes是 |
No否 |
No否 |
No否 |
Some部分 |
|
• Near Surface近表面 (<2 Microns微米) |
Some部分 |
Yes是 |
Yes是 |
Yes是 |
Yes是 |
|
Depth Profiling深度轮廓 |
Yes是 |
No否 |
No否 |
No否 |
No否 |
|
Identify Interfaces表面鉴别 |
Yes是 |
Yes是 |
Yes是 |
Yes是 |
Some部分 |
|
Quantitative Measurement定量检测 |
With Standards按标准 |
Yes是 |
Yes是 |
Yes是 |
Yes是 |
|
Elemental元素 |
Yes是 |
No否 |
No否 |
No否 |
Yes是 |
|
Chemical化学药剂 |
Yes是 |
Yes是 |
Yes是 |
Yes是 |
No否 |
|
Identifies Organic Species有机种类辨别 |
Yes是 |
Yes是 |
Yes是 |
Yes是 |
No否 |
|
Identifies Inorganic Species无机种类辨别 |
Yes是 |
Some部分 |
Some部分 |
No否 |
Yes是 |
|
Area Inspected检测区域 |
Small小 |
Small小 |
Small小 |
Small小 |
Small小 |
|
Limitations局限 |
Slow蛮 |
Slow慢 |
Slow慢 |
Slow慢 |
Slow慢 |
|
䦋㌌㏒㧀좈琰茞ᓀ㵂Ü |
Expensive昂贵 |
Expensive昂贵 |
Expensive昂贵 |
Expensive昂贵 |
Expensive昂贵 |
|
䦋㌌㏒㧀좈琰茞ᓀ㵂Ü |
High Skill Level高技术水平 |
High Skill Level高技术水平 |
High Skill Level高技术水平 |
High Skill Level高技术水平 |
High Skill Level高技术水平 |
|
Source: Problem Solving SURFACE ANALYSIS Techniques, Robert D. Cormia; Advanced Materials & Processes 12/92
来源：表面分析技术问题解决， Robert D. Cormia; 高级材质和工艺12/92 | |
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